发明名称 |
SPACE TRANSFORMER AND PROBE CARD |
摘要 |
A space transformer includes: a ceramic substrate that contains enstatite and boron nitride as components; a through hole running through in a thickness direction with respect to a sintered body in which the boron nitride is oriented in one direction; conductive material provided inside the through hole; and a wiring pattern including a plurality of electrodes provided on each of two principal surfaces, wherein a wiring pitch in the wiring pattern on one principal surface is different from a wiring pitch in the wiring pattern on the other principal surface. |
申请公布号 |
US2015002180(A1) |
申请公布日期 |
2015.01.01 |
申请号 |
US201314373229 |
申请日期 |
2013.01.15 |
申请人 |
NHK Spring Co., Ltd. |
发明人 |
Endo Naoki;Kaneda Noriyoshi;Miyaji Shinya |
分类号 |
G01R1/073 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
|
主权项 |
1. A space transformer comprising:
a ceramic substrate that contains enstatite and boron nitride as components; a through hole running through in a thickness direction with respect to a sintered body in which the boron nitride is oriented in one direction; conductive material provided inside the through hole; and a wiring pattern including a plurality of electrodes provided on each of two principal surfaces, wherein a wiring pitch in the wiring pattern on one principal surface is different from a wiring pitch in the wiring pattern on the other principal surface. |
地址 |
Yokohama-shi JP |