发明名称 SPACE TRANSFORMER AND PROBE CARD
摘要 A space transformer includes: a ceramic substrate that contains enstatite and boron nitride as components; a through hole running through in a thickness direction with respect to a sintered body in which the boron nitride is oriented in one direction; conductive material provided inside the through hole; and a wiring pattern including a plurality of electrodes provided on each of two principal surfaces, wherein a wiring pitch in the wiring pattern on one principal surface is different from a wiring pitch in the wiring pattern on the other principal surface.
申请公布号 US2015002180(A1) 申请公布日期 2015.01.01
申请号 US201314373229 申请日期 2013.01.15
申请人 NHK Spring Co., Ltd. 发明人 Endo Naoki;Kaneda Noriyoshi;Miyaji Shinya
分类号 G01R1/073 主分类号 G01R1/073
代理机构 代理人
主权项 1. A space transformer comprising: a ceramic substrate that contains enstatite and boron nitride as components; a through hole running through in a thickness direction with respect to a sintered body in which the boron nitride is oriented in one direction; conductive material provided inside the through hole; and a wiring pattern including a plurality of electrodes provided on each of two principal surfaces, wherein a wiring pitch in the wiring pattern on one principal surface is different from a wiring pitch in the wiring pattern on the other principal surface.
地址 Yokohama-shi JP