Droplet discharging device and particle manufacturing device

摘要

A droplet discharging device including a discharging hole to discharge droplets, a piezoelectric element that deforms with electrical charging and discharging to discharge droplets therefrom, a piezoelectric element drive circuit that drives the piezoelectric element to cause it to charge and discharge, wherein the piezoelectric element drive circuit has a control signal generating unit to generate control signals that control outputs of drive signals applied to the piezoelectric circuit and a drive signal output unit to output the drive signals applied to the piezoelectric element based on the control signals, wherein the drive signal output unit includes a first field effect transistor that operates to supply an electric current to the piezoelectric element based on the control signals when charging the piezoelectric element and a second field effect transistor that operates to discharge an electric current from the piezoelectric element based on the control signals when discharging the piezoelectric element.

主权项

1. A droplet discharging device comprising:
a discharging hole to discharge droplets; a piezoelectric element that deforms with electrical charging and discharging to discharge droplets from the discharging hole; and a piezoelectric element drive circuit that drives the piezoelectric element to cause the piezoelectric element to charge and discharge, wherein the piezoelectric element drive circuit comprises:
a control signal generating unit to generate a control signal that controls output of a drive signal applied to the piezoelectric circuit; anda drive signal output unit to output the drive signal applied to the piezoelectric element based on the control signal, wherein the drive signal output unit comprises:
a first field effect transistor that operates to supply an electric current to the piezoelectric element based on the control signal when charging the piezoelectric element; anda second field effect transistor that operates to discharge an electric current from the piezoelectric element based on the control signal when discharging the piezoelectric element.