发明名称 |
LIQUID TREATMENT APPARATUS |
摘要 |
In one embodiment, a clean gas supply mechanism includes a supply path having an upstream end provided with a gas intake port, and a downstream end connected to a treatment chamber. The supply path is provided therein with a fan, and a filter disposed upstream of the fan. A return path branches from the supply path at a first position downstream of the fan and upstream of the treatment chamber and is connected to the supply path at a second position downstream of the filter and upstream of the fan. A switching mechanism selectively switches between a first state where the clean gas flows into the treatment chamber, and a second state where the clean gas returns to the supply path through the return path. |
申请公布号 |
US2014352741(A1) |
申请公布日期 |
2014.12.04 |
申请号 |
US201414289992 |
申请日期 |
2014.05.29 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
NAKAMURA Tooru |
分类号 |
H01L21/67 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
1. A liquid treatment apparatus comprising:
a treatment chamber in which liquid treatment is performed to a treatment object; and a clean gas supply mechanism that supplies the treatment chamber with a clean gas, wherein the clean gas supply mechanism includes: a supply path having an upstream end provided with a gas intake port and a downstream end connected to the treatment chamber; a fan disposed in the supply path to form in the supply path a flow of the clean gas flowing from the gas intake port toward the treatment chamber; a filter disposed upstream of the fan in the supply path; a return path that branches from the supply path at a first position downstream of the fan and upstream of the treatment chamber, and that is connected to the supply path at a second position downstream of the filter and upstream of the fan; and a switching mechanism that selectively switches between a first state where the switching mechanism causes the clean gas flowing downstream from the fan to flow into the treatment chamber, and a second state where the switching mechanism causes the clean gas flowing downstream from the fan to return to the supply path through the return path. |
地址 |
Tokyo JP |