PELLICLE, PELLICLE FRAME, AND METHOD FOR MANUFACTURING PELLICLE

摘要

A pellicle provided with a pellicle frame (10) formed in a substantially rectangular frame shape by a pair of long side parts (10a) and a pair of short side parts (10b), and a pellicle film (11) stretchingly supported by the pellicle frame (10). The ratio of the long-side width/long-side length ratio of the side part is 0.3% to 2.2% inclusive. The short-side width/short-side length ratio of the side part is 0.3% to 3.8% inclusive. At least one side part of the long side parts (10a) and short side parts (10b) bulge to the outer side of the pellicle frame (10). The bulging side part elastically deforms toward the inner side of the pellicle film (10). In this state, the pellicle film (11) is affixed to the pellicle frame (10).