| 发明名称 | Device for producing an electron beam | ||
| 摘要 | Device for producing an electron beam includes a housing, which delimits a space that is evacuatable and has an electron beam outlet opening; an inlet structured and arranged for feeding process gas into the space; and a planar cathode and an anode, which are arranged in the space, and between which, a glow discharge plasma is producible by an applied electrical voltage. Ions are accelerateable from the glow discharge plasma onto a surface of the cathode and electrons emitted by the cathode are accelerateable into the glow discharge plasma. The cathode includes a first part made of a first material at least on an emission side, which forms a centrally arranged first surface region of the cathode, and a second part made of a second material, which forms a second surface region of the cathode that encloses the first surface region. | ||
| 申请公布号 | US8878422(B2) | 申请公布日期 | 2014.11.04 |
| 申请号 | US201113821887 | 申请日期 | 2011.09.08 |
| 申请人 | Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung e.V. | 发明人 | Mattausch Goesta;Feinaeugle Peter;Kirchhoff Volker;Weiske Dieter;Flaske Henrik;Zeibe Rainer |
| 分类号 | H01J1/02;F03H1/00;H01J27/26;H01J37/075 | 主分类号 | H01J1/02 |
| 代理机构 | Greenblum & Bernstein, P.L.C. | 代理人 | Greenblum & Bernstein, P.L.C. |
| 主权项 | 1. A device for producing an electron beam, comprising: a housing, which delimits a space that is evacuatable, and comprises an electron beam outlet opening; an inlet structured and arranged for feeding a process gas into the space; and a planar cathode and an anode, which are arranged in the space, and between which, a glow discharge plasma is producible by an applied electrical voltage, wherein ions are accelerateable from the glow discharge plasma onto a surface of the cathode and electrons emitted by the cathode are accelerateable into the glow discharge plasma, wherein: a) the cathode comprises a first part made of a first material at least on an emission side, which forms a centrally arranged first surface region of the cathode; b) the cathode comprises a second part made of a second material, which forms a second surface region of the cathode that encloses the first surface region; c) the first material is electrically conductive and has a melting point Ts>1750 K; and d) the first material is heatable by impingement with accelerated ions to a temperature at which electrons escape from the first material predominantly due to thermionic emission. | ||
| 地址 | Munich DE | ||