VERTICAL VACCUM ELECTRONIC DEVICE, METHOD THEREOF AND INTEGRATED DEVICE

摘要

A vertical vacuum electronic device, an integrated device, and a method for manufacturing the vertical vacuum electronic device are disclosed. The vertical vacuum electronic device, according to an embodiment of the present invention, comprises: a substrate; a first electrode layer formed on the surface of the substrate to expose a predetermined region of the surface of the substrate; an insulating material formed on the first electrode layer while having the same area as the first electrode layer; a second electrode layer formed on the insulating material; and a gate which is inserted into the insulating material, exposes a portion adjacent to the predetermined region, and is arranged to surround the predetermined region. The predetermined region is determined by the pattern of the gate.