发明名称 |
Material measures for use in evaluating performance of measuring instrument for measuring surface texture |
摘要 |
<p>A material measure for use in evaluating the performance of a measuring instrument for measuring surface texture includes: a measurement area having a plurality of grooves in a predetermined direction. With the configuration, each of the grooves has a simple cross-sectional shape at a cross-section along the predetermined direction; and a length of the cross-sectional shape in the predetermined direction is different for the predetermined number of adjacent grooves in the predetermined direction.</p> |
申请公布号 |
EP2287561(B1) |
申请公布日期 |
2014.10.01 |
申请号 |
EP20100008304 |
申请日期 |
2010.08.09 |
申请人 |
OLYMPUS CORPORATION |
发明人 |
KAKEMIZU, TAKAHIKO;FUJII, AKIHIRO |
分类号 |
G01B21/04;G01B3/30;G01B5/28 |
主分类号 |
G01B21/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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