发明名称 SUPPORT DEVICE AND MEASURING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a support device advantageous in shape reproducibility of an object at repetitive support.SOLUTION: A support device 1 includes: a first member 103 having a plurality of supporting points 106 for supporting an object W; a second member 104 for inclinably supporting the first member 103 by at least one degree-of-freedom; and initialization means 105 for inclining the first member 103 not supporting the object W by at least one degree-of-freedom in degrees-of-freedom so as to make the first member 103 to an initial inclined state.</p>
申请公布号 JP2014181986(A) 申请公布日期 2014.09.29
申请号 JP20130056251 申请日期 2013.03.19
申请人 CANON INC 发明人 OTA TETSUJI
分类号 G12B5/00;G01B21/20 主分类号 G12B5/00
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