| 摘要 |
The present invention is a template treatment apparatus forming a film of a release agent on a template having a transfer pattern formed on a front surface thereof, the template treatment apparatus including: a treatment station forming a film of a release agent on the front surface of the template; and a template carry-in/out station capable of keeping a plurality of the templates, and carrying the template into/out of the treatment station, wherein the treatment station includes: a cleaning unit cleaning the front surface of the template; a coating unit applying a release agent to the cleaned front surface of the template; a heating unit baking the applied release agent; and a carry unit carrying the template to the cleaning unit, the coating unit, and the heating unit. |
| 主权项 |
1. An imprint system, comprising:
a treatment station configured to perform a predetermined treatment on a template having a transfer pattern formed on a front surface of the template, to form a release agent film on the front surface of the template; a template carry-in/out station separate from the treatment station and configured to keep a plurality of the templates, and configured to carry the template into/out of said treatment station; an imprint unit configured to transfer the transfer pattern to a coating film formed on the substrate using the template having the film of the release agent formed on the front surface of the template in the treatment station, to form a predetermined pattern in the coating film; an interface station separate from the template carry-in/out station, a carry unit, and a substrate carry-in/out station, and configured to pass the template between the treatment station and the imprint unit; and the substrate carry-in/out station capable of keeping a plurality of the substrates, and carrying the substrate into/out of the imprint unit, wherein said treatment station comprises:
a cleaning unit configured to clean the front surface of the template;a coating unit configured to apply a release agent to the cleaned front surface of the template;a heating unit configured to bake the applied release agent; andthe carry unit separate from the template carry-in/out station, and configured to carry the template to and from said cleaning unit, said coating unit, and said heating unit, wherein the treatment station, the template carry-in/out station, the imprint unit, and the interface station are arranged adjacently, and are aligned in a straight line, and wherein the substrate carry-in/out station is arranged next to the imprint unit. |
