| 发明名称 |
METHOD FOR FORMING THIN FILM |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a thin film by which a sectional shape of the thin film can be controlled by a simple and convenient manner at low cost in order to improve flatness of the thin film formed by making a print on a surface of a base material with ink.SOLUTION: A method for forming a thin film comprises the steps of: making a print on a surface of a base material with ink having a composition including no less than 20 mass% of water; and drying the ink. A sectional shape of the thin film is controlled by adjusting the humidity within a range of 30%rh or higher, and the time for drying within a range of 60 minutes or shorter in the step of drying the ink. |
| 申请公布号 |
JP2014175448(A) |
申请公布日期 |
2014.09.22 |
| 申请号 |
JP20130046492 |
申请日期 |
2013.03.08 |
| 申请人 |
YAMAGATA UNIV;DIC CORP |
发明人 |
FUKUDA KENJIRO;KUMAKI DAISUKE;TOKITO SHIZUO |
| 分类号 |
H01L21/288;C09D11/00;H01L21/3205;H01L21/768;H05K3/12 |
主分类号 |
H01L21/288 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
