发明名称 Apparatus and method for predetermined component placement to a target platform
摘要 A method for placing a component on a target platform includes providing component alignment marks, target platform reference marks, a first multiple-sensor probe including first sensors, and a second multiple-sensor probe including third sensors. The method further includes determining second sensors included in the first sensors, and sensing a first signal from a first one of the alignment marks by at least one of the second sensors. The method further includes determining fourth sensors included in the third sensors. The method further includes sensing a second signal from a second one of the alignment marks by at least one of the fourth sensors, and detecting a deviation of the component from the target platform associated with a first position of one of the second sensors that sense the first signal and a second position of one of the fourth sensors that sense the second signal.
申请公布号 US8822238(B2) 申请公布日期 2014.09.02
申请号 US201113049302 申请日期 2011.03.16
申请人 Wintec Industries, Inc. 发明人 Chen Kong-Chen
分类号 H01L21/00;H01L23/544;H01L23/00;H01L21/66 主分类号 H01L21/00
代理机构 Kilpatrick Townsend & Stockton LLP 代理人 Kilpatrick Townsend & Stockton LLP
主权项 1. A method for placing a component on a target platform comprising: providing a plurality of alignment marks associated with a contact array at the component; providing a plurality of reference marks associated with a land pattern on the target platform; providing a first multiple-sensor probe including a first plurality of sensors; determining a second plurality of sensors included in the first plurality of sensors; sensing a first signal from a first one of the plurality of alignment marks by at least one of the second plurality of sensors; providing a second multiple-sensor probe including a third plurality of sensors; determining a fourth plurality of sensors included in the third plurality of sensors; sensing a second signal from a second one of the plurality of alignment marks by at least one of the fourth plurality of sensors; and detecting a deviation of the component from the target platform associated with a first position of the at least one of the second plurality of sensors that sense the first signal and a second position of the at least one of the fourth plurality of sensors that sense the second signal.
地址 Milpitas CA US