Dimensional probe and methods of use

摘要

Disclosed is a surface sensing apparatus, one embodiment having a source of coherent radiation capable of outputting wavelength emissions to create a first illumination state to illuminate a surface and create a first speckle pattern, an emission deviation facility capable of influencing the emission to illuminate the surface and create a second illumination state and a second speckle pattern, and a sensor capable of sensing a representation of the first and a second speckle intensity from the first and second speckle pattern. Also disclosed are methods of sensing properties of the surface, one embodiment comprising the steps of illuminating the surface having a first surface state with the source of coherent radiation emission, sensing a first speckle intensity from the surface, influencing a relationship of the surface to the emission to create a second surface state and sensing a second speckle intensity from the surface at the second surface state.

主权项

1. A surface sensing apparatus, said apparatus comprising:
at least one source of coherent radiation capable of outputting at least one wavelength emission to create a first illumination state and to illuminate a surface to create a first speckle pattern; an emission deviation facility capable of influencing the emission to illuminate the surface to create a second illumination state, a second speckle pattern and a speckle shift; and at least one sensor capable of sensing a representation of the first and a second speckle intensity from the first and second speckle pattern.