Method and system for high-throughput deposition of patterned organic thin films

摘要

High-throughput OVJP systems and methods are provided that may use multiple flow paths having different conductances to enable deposition with relatively short lag times. A high-throughput OVJP system may include a flow tube having a cross-sectional area much larger than the diameter of one or more apertures through which source material may be expelled during deposition. Use of such a configuration may allow for deposition with reduced lag times.

主权项

1. A device comprising:
an enclosure having a first end, a second end, and at least one aperture disposed between the first end and the second end; a source of organic molecules in fluid communication with the enclosure; a source of carrier gas in fluid communication with the source of organic molecules; a bypass valve; a first flow path from the organic source through the bypass valve, the first flow path having a first conductance; and a second flow path from the organic source through the at least one aperture, the second flow path having a second conductance; the first conductance being at least 100 times the second conductance when the bypass valve is open.