PLASMA SURFACE TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a plasma surface treatment device which has a sufficient exhaust function and enables downsizing of the device.SOLUTION: A plasma surface treatment device 1 radiates a plasma excitation gas generated by a plasma generating nozzle 2 from a plasma jetting port 22 to perform plasma treatment on a workpiece S. The plasma surface treatment device 1 includes: a gas recovery passage 3 in which a gas suction port 33 for suctioning the gas from an outer circumferential direction of the plasma jetting port 22 opens; and an ejector mechanism 4 which suctions the gas from the gas suction port 33 into the gas recovery passage 3 under negative pressure and exhausts the gas. The gas suction port 33 opens at an outer periphery of the plasma jetting port 22 in a circumferential form in a plan view.