| 发明名称 |
ROLL-TO-ROLL SPUTTERING METHOD |
| 摘要 |
A roll-to-roll sputtering method transports a flexible substrate wound on an unwinder roll to a depositing part, forms a deposited film on the flexible substrate, and winds the flexible substrate on a winder roll. The depositing part includes a first depositing part. The first depositing part includes a first sputtering part which deposits a first target material on one surface of the flexible substrate and a heater which is disposed at a side of the other surface of the flexible substrate to heat the flexible substrate. |
| 申请公布号 |
US2014154424(A1) |
申请公布日期 |
2014.06.05 |
| 申请号 |
US201314093777 |
申请日期 |
2013.12.02 |
| 申请人 |
Samsung Corning Precision Materials Co., Ltd. |
发明人 |
Oh Jung Hong;An Jin Soo;Rim Chang Moog;Yang Gi Mo;Oh Sang Yoon |
| 分类号 |
C23C14/50 |
主分类号 |
C23C14/50 |
| 代理机构 |
|
代理人 |
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| 主权项 |
1. A roll-to-roll sputtering method which transports a flexible substrate wound on an unwinder roll to a depositing part, forms a deposited film on the flexible substrate, and winds the flexible substrate on a winder roll, wherein the depositing part comprises a first depositing part, the first depositing part comprising:
a first sputtering part which deposits a first target material on one surface of the flexible substrate; and a heater which is disposed at a side of the other surface of the flexible substrate to heat the flexible substrate.
|
| 地址 |
Gyeongsangbuk-do KR |
