| 摘要 |
<p>Disclosed is a radiofrequency signal phase-adjustable radiofrequency power supply. The radiofrequency power supply comprises a radiofrequency signal generator, a radiofrequency power amplifier circuit, a power supply circuit, and a radiofrequency power detector. The radiofrequency signal generator comprises a phase adjustor circuit. The phase adjustor circuit is for use in adjusting the phase of an externally inputted radiofrequency signal. The present invention has the phase adjustor circuit embedded into the radiofrequency signal generator, and therefore allows for adjustment of the phase of the synchronous access radiofrequency signal, eliminates a signal phase difference between the present radiofrequency power supply and a radiofrequency power supply providing the radiofrequency signal, prevents crosstalk, and increases process stability.</p> |
