| 摘要 |
The present invention relates to a method for detecting foreign substances existing on a substrate set having a first transparent substrate and a second transparent substrate coupled to each other by means of a transparent resin layer, the method including the steps of: (A) moving the substrate set in a first direction and in a second direction opposite to the first direction; (B) photographing the substrate set inclined by a given angle during the movements in the first direction and in the second direction to obtain the images detected in the first direction and in the second direction; (C) comparing the detected image in the first direction with the detected image in the second direction and determining the images having no changes in coordinate values as foreign substances and the images having changes in the coordinate values as shadow; and (D) determining whether the foreign substances exist on the interior of the substrate set or on the surface thereof on the basis of the distance between the foreign substances and the shadow separated from the foreign substances. [Reference numerals] (AA) First direction; (BB) Second direction |
