发明名称 VERTICAL-CAVITY SURFACE-EMITTING LASER AND METHOD OF FABRICATING THE SAME
摘要 Provided are a wavelength swept vertical-cavity surface-emitting laser and a method of fabricating the same. The laser may include a substrate, a lower reflection layer on the substrate, an active layer on the lower reflection layer, a sacrificial layer disposed on a first side of the active layer, a stopper disposed on a second side of the active layer that may be spaced apart from the sacrificial layer, and an upper reflection layer fixed on the sacrificial layer, the upper reflection layer extending over the stopper and the active layer. The stopper defines a minimum separation distance between the upper reflection layer and the active layer.
申请公布号 US2014079085(A1) 申请公布日期 2014.03.20
申请号 US201313974891 申请日期 2013.08.23
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 SONG HYUN WOO
分类号 H01S5/183;H01S5/20 主分类号 H01S5/183
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