PHYSICAL QUANTITY MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a physical quantity measuring device for improving detection accuracy during pulsation and in a low flow area.SOLUTION: A physical quantity measuring device comprises: sensor elements 105-107 disposed in a fluid; a heat generation part 104 formed on the sensor element and a physical quantity detection part 300; a derivation part 302 for deriving a physical parameter of the fluid in response to a detection value of the physical quantity detection part; heat generation controlling means 400 for monitoring the temperature of the heat generation part to perform a feedback control of a drive signal given to the heat generation part; and gain changing means 500 for changing a feedback gain of the heat generation controlling means.