ACTIVE VIBRATION-FREE DEVICE, VIBRATION-FREE METHOD, PROCESSING DEVICE, INSPECTION DEVICE, EXPOSURE DEVICE, AND METHOD FOR PRODUCING WORKPIECE

摘要

PROBLEM TO BE SOLVED: To provide an active vibration-free device which copes with a wide range of vibration acceleration by only one type of vibration-free mechanism.SOLUTION: An active vibration-free device switches in occurrence of excessively large acceleration to multiply an acceleration detection gain 14b of an acceleration amplifier 14 by a predetermined magnification, to enlarge a cut-off frequency of a high pass filter 11a of a vibration control unit 11, and to multiply an acceleration control gain 11b of the vibration control unit 11 by an inverse of the predetermined magnification.