| 摘要 |
A processing system for micro processing. The processing system comprises a laser configured to generate a laser beam for performing laser processing within a preparation chamber. The processing system further comprises a transmission window, configured such that the laser beam enters into the preparation chamber through the transmission window. The processing system further comprises a fastening flange for fixing the transmission window relative to the preparation chamber, and a laser shield configured to provide, in a first arrangement of the laser shield, glare protection from a passage of the laser beam from a laser beam housing to the preparation chamber. The laser shield is movably mounted for movement between the first arrangement and a second arrangement of the laser shield, wherein in the second arrangement, at least one of the transmission window and the fastening flange is separable from the processing system. |
