| 摘要 |
A microwave introducing mechanism 43 includes a cylindrical container 50; an inner conductor 52, coaxially provided in the container 50, a microwave transmission path being defined between the container 50 and the inner conductor 52; a tuner 44 for adjusting an impedance of the microwave transmission path 53; and an antenna section 45 including an antenna 51 for radiating to the chamber a microwave transmitted through the microwave transmission path 53. The tuner 44 includes a pair of slugs 58 made of a dielectric material and movable along the inner conductor 52; an actuator 59 for moving the slugs 58; and a controller 60. The controller 60 controls both the slugs 58 to move together in a range of a ½ wavelength of the microwave and one of the slugs 58 to move in a range of a ¼ wavelength of the microwave with regard to the other slug. |
