发明名称 |
METHOD FOR PRODUCING THIN FILM CONSISTING OF NANOSHEET MONOLAYER FILM BY SPIN COAT METHOD, AND HYPERHYDROPHILIZED MATERIAL, SUBSTRATE FOR OXIDE THIN FILM AND DIELECTRIC MATERIAL OBTAINED THEREFROM |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a thin film consisting of nanosheet monolayer film(s) and use of the thin film obtained thereby.SOLUTION: A method for producing a thin film consisting of nanosheet monolayer film(s) by a spin coat method comprises a step of preparing an organic solvent sol formed by allowing nanosheets obtained by the exfoliation of an inorganic layered substance to be dispersed in an organic solvent; and a step of dropping the organic solvent sol onto a substrate and rotating the substrate using a spin coater. Preferably, the nanosheet size, the organic solvent sol concentration and the spin coater rotation speed are controlled. |
申请公布号 |
JP2013253009(A) |
申请公布日期 |
2013.12.19 |
申请号 |
JP20120177153 |
申请日期 |
2012.08.09 |
申请人 |
NATIONAL INSTITUTE FOR MATERIALS SCIENCE |
发明人 |
SASAKI TAKAYOSHI;SARUWATARI KAZUKO;MATSUBA KAZUAKI;AKATSUKA KIMIAKI;EBINA YASUO;OSADA MINORU |
分类号 |
C01G23/04;C01G33/00 |
主分类号 |
C01G23/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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