ILLUMINATION DEVICE, PROCESSING DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

An illumination device (IU) comprises: a first light source unit (21a); a second light source unit (21b) with a light emission direction which differs from that of the first light source unit; and a deflector unit (22) which deflects at least a portion of light such that a progress direction of light from the first light source unit and of light from the second light source unit are collected. The first light source unit and the second light source unit are positioned in different locations in prescribed directions such that illumination regions into which light enters which is emitted from each light source unit and transits the deflection unit are aligned contiguously in the prescribed directions.