INTEGRATED PIEZOELECTRIC RESONATOR WITH A MASS BIAS
摘要
An integrated resonator apparatus (100) includes a piezoelectric resonator (120, 124, 128) and an acoustic Bragg reflector (149) formed adjacent the piezoelectric resonator. The integrated resonator apparatus also includes a mass bias (170) formed over the Bragg reflector (149).
申请公布号
WO2013181554(A1)
申请公布日期
2013.12.05
申请号
WO2013US43645
申请日期
2013.05.31
申请人
TEXAS INSTRUMENTS INCORPORATED;TEXAS INSTRUMENTS JAPAN LIMITED
发明人
BURGESS, BYRON, N.;KRENIK, WILLIAM, R.;JACOBSEN, STUART, M.
