发明名称 Semiconductor device and method for forming the same
摘要 The semiconductor device comprises a metal line configured to be buried in an interlayer insulation layer formed over a semiconductor substrate, a first insulating pattern configured to be formed over the interlayer insulating layer and the first metal line so that the first metal line is exposed, a second insulating pattern configured to be buried between the first insulating patterns so that the first metal line is exposed, and a third insulating pattern configured to be formed over the first insulating pattern and the second insulating pattern so that the first metal line is exposed, thereby reducing the resistance of a contact plug, such that it operates at high speed and requires low power consumption.
申请公布号 US8598711(B2) 申请公布日期 2013.12.03
申请号 US20100957073 申请日期 2010.11.30
申请人 JANG CHI HWAN;HYNIX SEMICONDUCTOR INC. 发明人 JANG CHI HWAN
分类号 H01L23/48;H01L23/52;H01L29/40 主分类号 H01L23/48
代理机构 代理人
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