PARTICLE MEASUREMENT DEVICE

摘要

A foreign material measuring device is disclosed. A foreign material measuring device according to the embodiment of the present invention includes an inspection object, a driving unit which generates foreign materials of the inspection object by driving the inspection object to grasp the state of the foreign materials of the inspection object, a foreign material collecting tube which is connected to the driving unit and collects the foreign materials which are generated from the inspection object, and a particle counter which grasps the state of the foreign materials of the inspection object by sucking the foreign materials collected by the foreign material collecting tube.