发明名称 Electrode carrier assemblies
摘要 In accordance with one embodiment of the present disclosure, an electrode carrier assembly is provided including an electrode carrying annulus and a plurality of electrode mounting members. The electrode carrying annulus includes an electrode containment sidewall that forms an inner or outer radius of the electrode carrying annulus. The electrode carrying annulus further includes a plurality of radial sidewall projections that project radially away from the electrode containment sidewall. The radial sidewall projections each include an upward-facing tapered spacer including an upward-facing micro-mesa. The electrode mounting members each include a downward-facing tapered spacer including a downward-facing micro-mesa. The electrode mounting members are rotatably engaged with the electrode carrying annulus, and are configured to rotate between a free position and a bracketed position.
申请公布号 US8580079(B2) 申请公布日期 2013.11.12
申请号 US20100817699 申请日期 2010.06.17
申请人 LA CROIX CLIFF;AVOYAN ARMEN;OUTKA DUANE;ZHOU CATHERINE;SHIH HONG;LAM RESEARCH CORPORATION 发明人 LA CROIX CLIFF;AVOYAN ARMEN;OUTKA DUANE;ZHOU CATHERINE;SHIH HONG
分类号 H01J1/94 主分类号 H01J1/94
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