发明名称 VAPORIZER
摘要 Provided is a vaporizer that can reduce ripples, particles, and a carbon content of a film and can supply a raw material capable of forming a film having a desired composition. Moreover, a vaporizer is obtained that sufficient vaporization can be performed without heating more than necessary and temperature management can be facilitated. A vaporizer includes a vaporizer main body (3) into which a carrier gas having a film forming liquid material dispersed is introduced and a heater main body (4) disposed in the vaporizer main body (3). The shape of the inlet portion of the heater main body is in a cone.
申请公布号 EP2657957(A1) 申请公布日期 2013.10.30
申请号 EP20110849995 申请日期 2011.12.21
申请人 KABUSHIKI KAISHA WATANABE SHOKO;KUSUHARA, MASAKI;UMEDA, MASARU;TODA, MASAYUKI 发明人 KUSUHARA, MASAKI;UMEDA, MASARU;TODA MASAYUKI;FUKAGAWA, MITSURU
分类号 C23C16/448;B01D1/00;C23C16/455 主分类号 C23C16/448
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