| 摘要 |
A gas supply apparatus and a gas supply method thereof are provided to prevent an accident due to gas leakage by preventing a freezing effect of a gas supply tube. A gas vessel(11,12) is formed to store a process gas. A pressure control unit(20,30) reduces the pressure of the process gas supplied from the gas vessel in multiple steps and perform a temperature compensation process after a pressure-reducing process. A gas supply tube is formed to supply the pressure-controlled process gas through the pressure control unit. The pressure control unit includes a plurality of regulators(22,24,32,34) for performing pressure-reducing operations. A tube line is formed to connect the regulators with each other to compensate temperature by using external air. |
