TRANSPARENT COMPOSITE CONDUCTIVE OXIDE THIN FILMS AND METHOD FOR PREPARING THE OXIDE THIN FILMS

摘要

PURPOSE: A transparent composite conductive oxide film has a simple manufacturing process, excellent optical and electric performance, and is used as a transparent conductive film with high luminous efficiency. CONSTITUTION: A transparent composite conductive oxide film CuOx:AZO transparent composite conductive oxide film consists of CuO and aluminum-doped AZO. The molar ratio of the CuO is 0.5-2.0 mol%. A manufacturing method of the transparent composite conductive oxide film comprises a step of forming a CuOx:AZO composite solution by dissolving copper chloride hydrate in an AZO solution; a step of forming a thin film on a substrate by using the composite solution; a step of sintering the thin film in an Ar atmosphere at 400-450°C; and a step of annealing the thin film in a N2/H2 gas atmosphere at 400-450°C and annealing it in order to form a CuOx:AZO thin film.