发明名称 METHOD FOR MANUFACTURING SINGLE PARTICLE FILM ON NON-FLAT SURFACE, METHOD FOR MANUFACTURING FINE STRUCTURE USING SINGLE PARTICLE FILM ETCHING MASK, AND FINE STRUCTURE OBTAINED BY THE SAME METHOD
摘要 PROBLEM TO BE SOLVED: To provide a single particle film etching mask on a curved surface in which each particle composing a single particle film are close-packed in two-dimensions and are highly accurately arranged, a method for manufacturing the single particle film etching mask, a method for manufacturing a fine structure on a curved surface using the single particle film etching mask, and the highly accurate fine structure on a curved surface obtained by the same manufacturing method.SOLUTION: A method for manufacturing a single particle film on a non-flat surface comprises: a dropping process for dropping dispersion liquid dispersed with particles in a solvent on a liquid surface in a water tank; a single particle film forming process for forming a single particle film composed of the particles by vaporizing the solvent; and a transferring process for transferring the single particle film on a substrate consisting of a part or a whole having a surface of a pitch or a dimension of 0.1-10,000 μm along a surface direction in a non-flat part such as a curved surface or a step.
申请公布号 JP2013210678(A) 申请公布日期 2013.10.10
申请号 JP20130130073 申请日期 2013.06.21
申请人 OJI HOLDINGS CORP 发明人
分类号 G02B1/11;B01J19/00;B01J19/10 主分类号 G02B1/11
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