发明名称 VACUUM-DEPOSITION APPARATUS
摘要 <p>In the present invention, there is provided a vacuum deposition apparatus in which a partitioning part is exceptionally durable, the vacuum deposition apparatus enabling a thick vapor-deposition film of predetermined composition to be formed on a traveling film surface in a stable and continuous manner, and at a high level of quality, over a prolonged period of time. The vacuum-deposition apparatus is characterized in being provided with a material-holding means having a partitioning part for keeping at least two or more different types of vapor-deposition materials apart in a vacuum tank and a linking plate for holding the partitioning part at a fixed spacing, and a heating means for causing the vapor-deposition material to evaporate; and in that the partitioning part has a mechanism capable of extending or contracting in a direction orthogonal to the partitioning direction in a vacuum-deposition apparatus for forming a vapor-deposition film on a film traveling through the vacuum tank.</p>
申请公布号 WO2013146601(A1) 申请公布日期 2013.10.03
申请号 WO2013JP58334 申请日期 2013.03.22
申请人 TOYOBO CO., LTD. 发明人 IZEKI, SEIJI
分类号 C23C14/24 主分类号 C23C14/24
代理机构 代理人
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