| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle film lamination device in which the diffusibility of hydrogen is made better when nanoparticles obtained by being evaporated are the ones produced from a hydrogen storage alloy, and which is capable of preventing the re-flocculation of the nanoparticles collected in a substrate, and to provide a particle film lamination method using the particle film lamination device.SOLUTION: A particle film lamination device includes: a nanoparticle production chamber 2 in which the nanoparticles 12 of a metallic material 9 are produced; a nanofiber production chamber 3 in which the nanofibers 13 of a resin material 11 are produced; a lamination chamber 4 in which the nanoparticles 12 and the nanofibers 13 are film-formed and laminated to a substrate 18; a nanoparticle film formation region 15 in which the nanoparticles 12 are film-formed in a film formation chamber 4; a nanofiber film formation region 16 in which the nanofibers 13 are film-formed in the film formation chamber 4; a movement unit 17 in which the substrate 18 is moved between the nanoparticle film formation region 15 and the nanofiber film formation region 16; an exhaust unit 5 in which the lamination chamber 4 is exhausted; and a cooling gas introduction unit 8 in which cooling gas is introduced into each of the nanoparticle production chamber 2 and the nanofiber production chamber 3. |
