发明名称 LAMINATED SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a direct laminated semiconductor device and a manufacturing method of the same, which do not require electrode formation from a rear face side and do not increase the number of electrode formation processes.SOLUTION: A laminated semiconductor device in which a plurality of semiconductor elements 91 including impurity diffusion layers 33, 34 and an insulation layer 61 sequentially formed on an embedded oxide film 21 are laminated, comprises: through electrodes 72, 73 which pierces the insulation layer, the impurity diffusion layers and the embedded oxide film.
申请公布号 JP2013191639(A) 申请公布日期 2013.09.26
申请号 JP20120055146 申请日期 2012.03.12
申请人 NIPPON HOSO KYOKAI <NHK> 发明人 IGUCHI YOSHINORI;OTAKE HIROSHI;YONEUCHI ATSUSHI;HAGIWARA HIROSHI;GOTO MASAHIDE
分类号 H01L23/522;H01L21/336;H01L21/768;H01L21/8234;H01L25/065;H01L25/07;H01L25/18;H01L27/00;H01L27/08;H01L27/088;H01L29/41;H01L29/417;H01L29/786 主分类号 H01L23/522
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