| 摘要 |
<p>A ceramic member (200) is provided with: a plurality of ceramic layers (291-297), which have insulating characteristics, and which are integrally fired; attracting electrodes (372, 374, 376, 378), which are formed on a first ceramic layer (296), and which are configured such that the electrodes can attract dielectric material with an electrostatic force; power supply ports (312, 316), which receive power supply with respect to the attracting electrodes (372, 374, 376, 378) from the outside of the ceramic member (200); lands (332, 336), i.e., conductive bodies, which are formed on a second ceramic layer (295), and which are configured such that the conductive bodies can receive power through the power supply ports; and vias (352, 354, 356, 358), i.e., conductive bodies, which penetrate at least one of the ceramic layers, and which electrically connect the attracting electrodes (372, 374, 376, 378), and the lands (332, 336) to each other.</p> |
