| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration element capable of detecting angular velocities of two axes intersecting with each other around respective axes.SOLUTION: A gyro sensor 2 includes: a base portion 41; a first coupling arm 44 and a second coupling arm 45 that are extended along an X axis with the base portion 41 interposed therebetween; a first detection vibrating arm 421 and a second detection vibrating arm 422 that are extended along a Y axis with the base portion 41 interposed therebetween; a first drive vibrating arm 46 extended from the first coupling arm 44 along the Y axis; and a second drive vibrating arm 47 extended from the second coupling arm 45 along the Y axis. Each of the first drive vibrating arm 46 and the second drive vibrating arm 47 vibrates in a Z axis direction. Each of the first coupling arm 44, the second coupling arm 45, the first detection vibration arm 421, and the second detection vibration arm 422 is provided with detecting means and vibrates in a plane including the X axis and the Y axis when an angular velocity is applied around a detection axis. |
