发明名称 Processes for recovering silane from heavy-ends separation operations
摘要 Processes and systems for purifying silane-containing streams are disclosed with relatively less silane being lost in impurity streams by use of distillation and/or condensation operations.
申请公布号 US8524048(B2) 申请公布日期 2013.09.03
申请号 US20100898494 申请日期 2010.10.05
申请人 GU ZHIHUI;TRUONG TIMOTHY D.;GUPTA PUNEET;MEMC ELECTRONIC MATERIALS, INC. 发明人 GU ZHIHUI;TRUONG TIMOTHY D.;GUPTA PUNEET
分类号 B01D3/14;C01B33/04;F25J1/00 主分类号 B01D3/14
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