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发明名称
ATOMIC LAYER DEPOSITION APPARATUS FOR GENERATING UNIFORM PLASMA
摘要
申请公布号
KR20130092813(A)
申请公布日期
2013.08.21
申请号
KR20120014347
申请日期
2012.02.13
申请人
K.C.TECH CO., LTD.
发明人
SEOK, JANG HYEON
分类号
C23C16/44;C23C16/50;C23C16/513
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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