发明名称
摘要 PROBLEM TO BE SOLVED: To improve cleaning performance by increasing the spray speed of a cleaning liquid from a spray opening by making appropriate the shape of a liquid passage. SOLUTION: The cleaning nozzle 11 is composed by fitting and fixing a ceramic nozzle tip 13 in a nearly-cylindrical nozzle case 12. The liquid passage 14 extending in the axial direction and comprising a tip-side straight part 14a and a base end-side diameter-reduced part 14b is formed at the center of the nozzle tip 13. A V-groove 16 is formed at a tip part of the nozzle tip 13, and the spray opening 17 for spraying the cleaning liquid is opened at its center part. The ratio L1/D1 of the axial length L1 of the straight part 14a to the diameter D1 of the straight part 14a is set to 7.8-15. The cross-sectional shape of the diameter-reduced part 14b along the axial direction is formed into a gentle round shape. The cutout angle θ of the V-groove 16 is set to 40°-65°. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP5270317(B2) 申请公布日期 2013.08.21
申请号 JP20080304121 申请日期 2008.11.28
申请人 发明人
分类号 H01L21/304;B05B1/02 主分类号 H01L21/304
代理机构 代理人
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