SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER METHOD, AND STORAGE MEDIUM

摘要

PROBLEM TO BE SOLVED: To precisely transfer a substrate to a module even if there are a small number of sensor parts for detecting respective positions of peripheral edges of the substrate when transferring a circular substrate in which a cut is provided at the peripheral edge.SOLUTION: A substrate transfer device executes following steps: first and second steps in which a substrate holding part that holds a substrate received from a first module is positioned at a first position and a second position which are preset to a sensor part respectively, for detecting respective positions of peripheral edges of the substrate; a third step in which a type of abnormal state in which light radiation region of a light source part is positioned at a cut of the substrate is discriminated; and a fourth step which selects to determine a delivery position of the substrate holding part to a second module on the basis of respective positions of the peripheral edges detected at the first position or the second position by discrimination in the third step, or selects to determine the delivery position on the basis of respective positions by detecting the respective positions of the peripheral edges of the substrate at the third position again.