发明名称 |
COMPOSITION, ABRASIVE PAD, AND METHOD FOR PRODUCING COMPOSITION |
摘要 |
PROBLEM TO BE SOLVED: To provide a composition having a high rate of elongation, a method for producing the same, and an abrasive pad which provides less defects on a wafer surface, and has a further extended pad life.SOLUTION: A composition includes a polymer obtained by polymerizing an ethylenic unsaturated compound and a polyurethane, and includes a compound having isocyanurate group as the ethylenic unsaturated compound. |
申请公布号 |
JP2013159705(A) |
申请公布日期 |
2013.08.19 |
申请号 |
JP20120022698 |
申请日期 |
2012.02.06 |
申请人 |
TORAY IND INC |
发明人 |
MIZUTANI ATSUKO;OZEKI TAKENARI;YAMAMOTO TETSUYA |
分类号 |
C08F2/44;B24B37/24;C08F283/00;H01L21/304 |
主分类号 |
C08F2/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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