发明名称 COMPOSITION, ABRASIVE PAD, AND METHOD FOR PRODUCING COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a composition having a high rate of elongation, a method for producing the same, and an abrasive pad which provides less defects on a wafer surface, and has a further extended pad life.SOLUTION: A composition includes a polymer obtained by polymerizing an ethylenic unsaturated compound and a polyurethane, and includes a compound having isocyanurate group as the ethylenic unsaturated compound.
申请公布号 JP2013159705(A) 申请公布日期 2013.08.19
申请号 JP20120022698 申请日期 2012.02.06
申请人 TORAY IND INC 发明人 MIZUTANI ATSUKO;OZEKI TAKENARI;YAMAMOTO TETSUYA
分类号 C08F2/44;B24B37/24;C08F283/00;H01L21/304 主分类号 C08F2/44
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