发明名称 GRAPHITE CRUCIBLE AND SILICON SINGLE CRYSTAL MANUFACTURING APPARATUS
摘要 <p>To provide a graphite crucible for silicon single crystal manufacturing according to the Czochralski method, wherein the graphite crucible has a long life cycle. A characteristic resides in that at least one gas venting hole is provided in a corner portion of the crucible. A gas generated by a reaction between the graphite crucible and a quartz crucible is released to the outside through said at least one gas venting hole. Thereby, formation of SiC on the surface of the graphite crucible and deformation of the quartz crucible caused by the pressure of the gas are prevented.</p>
申请公布号 KR101297473(B1) 申请公布日期 2013.08.16
申请号 KR20100116246 申请日期 2010.11.22
申请人 发明人
分类号 C04B35/52;C30B15/10;C30B29/06 主分类号 C04B35/52
代理机构 代理人
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