| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional measuring device which allows for high measuring accuracy in three-dimensional measuring.SOLUTION: A substrate inspection device 10 includes a conveyor 13 which transports a printed circuit board 1, a lighting device 14 which allows the printed circuit board 1 to be irradiated with one of the four pattern beams having different luminance, and a camera 15 which photographs the printed circuit board 1 irradiated with the pattern beam. For every specified number of the transported printed circuit boards 1, four image data photographed under pattern beams having the same luminance with a specified phase variation are grouped into one. Group data of four groups photographed under the four pattern beams are obtained. Subsequently it is determined whether the luminance value of each pixel in the image data is included in a predetermined effective range H, so that group data having the luminance value of each pixel in the image data within the effective range H are extracted from the four group data. Three-dimensional measuring is performed based on the extracted group data. |
