| 摘要 |
In a BiCMOS device, a device isolation film separating the bipolar transistor region from the MOS region is taller than the substrate at least where it contacts the bipolar transistor region, and is preferably taller than the same layer where it contacts the MOS transistor region. This makes it possible to maintain the processing accuracy of a MOS transistor while stabilizing the diode current characteristics of the bipolar transistor.
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