| 摘要 |
PURPOSE: A substrate processing system is provided to improve the removal efficiency of fumes by supplying a nitrogen gas and an argon gas with an oxygen gas to a substrate to prevent a dissociated oxygen atom from being recombined into an oxygen molecule. CONSTITUTION: A cassette module(100) receives substrates before a treatment process and after the treatment process. An atmosphere transport module(200) transports the substrate in the cassette module. A first load lock chamber(301) and a second load lock chamber(302) convert pressure in an atmosphere state and a vacuum state. A first process line(401) and a second process line(402) successively process a plurality of different processes for the substrate. An unload lock chamber(700) is connected to a second process chamber(600) of the first process line and a second process chamber connected to the second process line.
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