| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray examination device in which an X-ray blocking member is not wasted at changing of an outer cover and the degree of freedom of appearance design is increased. <P>SOLUTION: An X-ray examination device 100 includes: an X-ray source 3 that irradiates a substrate P with an X-ray; a shielding wall 5 covering the X-ray source 3 for blocking the X-ray; a substrate conveying section 2 for conveying the substrate P through a region covered with the wall 5; and an outer cover 6 outside the wall 5 covering the substrate conveying section 2. The cover 6 is removable with the wall 5 being equipped. <P>COPYRIGHT: (C)2013,JPO&INPIT |
