3D scanning acousto-optic microscope

摘要

A scanning microscope includes an acousto-optic scanner that produces a scanned beam. A beam separator based on total internal reflection or angle tuning of a dielectric filter separates an unscanned portion of an excitation light flux from a scanned portion. The scanned beam is directed to a specimen, and optical radiation generated in response to the scanned beam is directed to a detector that produces a detected signal that can be used to determine an image. The scanned beam can be directed to the specimen without formation of any intermediate focusing.