| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing high-purity silicon carbide powder capable of producing high-purity silicon carbide powder inexpensively and safely in large quantities by using an Acheson furnace, and reducing power consumption in production of the high-purity silicon carbide powder. <P>SOLUTION: In this method for producing high-purity silicon carbide powder, particles comprising silica and carbon in which each of silica and carbon is distributed all around in particles and each content rate of B and P is ≤1 ppm are heated by using an Acheson furnace, to thereby obtain high-purity silicon carbide powder. Preferably, in the particle comprising silica and carbon, the content rate of silica is ≤90 mass% and the content rate of carbon is ≥10 mass% at every spot in the particle. <P>COPYRIGHT: (C)2013,JPO&INPIT |
