| 摘要 |
<P>PROBLEM TO BE SOLVED: To generate stable pulse laser light. <P>SOLUTION: An extreme ultraviolet light generation apparatus may also comprise a first laser device which irradiates a target substance with first laser light, a second laser light which generates extreme ultraviolet light by irradiating the target substance which is diffused by the irradiation with the first layer light, with second laser light and a third laser device which performs irradiation with third laser light of which the energy is lower than that of the second laser light, after the irradiation with the first laser light and before the irradiation with the second laser light. <P>COPYRIGHT: (C)2013,JPO&INPIT |
